![YGK](img/overseas_title_s01.gif) |
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![YPI-MX-DC](img/YPI-MX-1.png)
[ Dual Heads Particle Scanner ]
It's not limited to SiC, can aiso measure transparent glass wafer, the silicon wafer.
EMinimum detection particle size : 0.1m.
EThe measurement within 5 minutes, including the latent flaw detection measurement of 4 inches SiC wafer.
YGK : HP |
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![YPI-MX-DC](img/YPI-MX.jpg)
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![YPI-MN](img/YPI-MN.png)
Small particle surface scanner equipped with a new small particle sensor.
Possible measurement of transparent glass substrate.
YGK : HP |
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![YPI-MN](img/YPI-MN.jpg) |
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![YPI-100](img/YPI-100.png)
Glass plate particle inspection system
ESilicon wafers, glass plates, etc.
EMinimum detectable particle size : 0.5m.
YGK : HP |
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![YPI-100](img/YPI-100.jpg) |
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![YPI-200](img/YPI-200.png)
Transparent substrate particle inspection system
ESimple operation.
EDesktop type.
EMinimum detectable particle size : 0.152m.
YGK : HP |
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![YPI-200](img/YPI-200.gif) |
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![Glass Substrate](img/Glass Substrate.png) |
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![YPI-MX-XYA](img/YPI-MX-XYA.png)
![YPI-MX-A](img/YPI-MX-A.png)
Top and back isolation(Automatic)
EAvailable for separating front and back with autofocus sensor.
EMinimum detection particle size : Quartz 0.2m.
ETestable substrate:Quartz, Sapphires, SiC substrates, Sic substrates with epitaxial layer, etc.
YGK : HP |
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![YPI-MX-XYA](img/YPI-MX-XYA.jpg)
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![YPI-MX-XY](img/YPI-MX-XY.png)
![YPI-MX-](img/YPI-MX-.png)
Top and back isolation(Manual)
EAvailable for separating front and back with autofocus sensor.
EMinimum detection particle size : Quartz 0.2m.
ETestable substrate:Quartz, Sapphires, SiC substrates, Sic substrates with epitaxial layer, etc.
YGK : HP |
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![YPI-MX-XY](img/YPI-MX-XY.jpg) |
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![Sillicon Wafer](img/Sillicon Wafer.png) |
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![YPI-N-XYA](img/YPI-N-XYA.png)
![YPI-MX-XA](img/YPI-N-XA.png)
Available for mirror substrate(sillicon wafers, etc.)
EHigh speed scanning.
ESubstrate size : 2`8 inch
EMinimum detection particle size : Si wafers : 0.1m.
ETestable substrate:Si wafers, Variety of wafers with films.
YGK : HP |
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![YPI-N-XYA](img/YPI-N.jpg)
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![YPI-N-XY](img/YPI-N-XY.png)
![YPI-N-](img/YPI-N-.png)
Available for mirror substrate(sillicon wafers, etc.)
EHigh speed scanning.
ESubstrate size : 2`8 inch
EMinimum detection particle size : Si wafers : 0.1m.
ETestable substrate:Si wafers, Variety of wafers with films.
YGK : HP |
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![YPI-N-XY](img/YPI-N-XY.jpg) |